A comparative study of growth of ZnSe films on GaAs by conventional molecular‐beam epitaxy and migration enhanced epitaxy
作者:
Jarmo Lilja,
Jari Keskinen,
Minna Hovinen,
Markus Pessa,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1989)
卷期:
Volume 7,
issue 4
页码: 593-598
ISSN:0734-211X
年代: 1989
DOI:10.1116/1.584800
出版商: American Vacuum Society
关键词: ZINC SELENIDES;FILMS;CRYSTAL GROWTH METHODS;MOLECULAR BEAM EPITAXY;MIGRATION;COMPARATIVE EVALUATIONS;GALLIUM ARSENIDES;SUBSTRATES;COATINGS;CRYSTAL STRUCTURE;ELECTRICAL PROPERTIES;ZnSe
数据来源: AIP
摘要:
Growth of high‐quality ZnSe films on GaAs(100) substrates by conventional molecular‐beam epitaxy (MBE) and migration enhanced epitaxy (MEE) have been examined. We have found a self‐regulatory MEE process in the temperature range between 350 and 400 °C where a complete monolayer of ZnSe was achieved per three operational cycles of Zn+Sen. Thin films (<1 μm) grown by self‐regulatory MEE exhibited much higher structural perfection than MBE thin ZnSe films grown under closely identical conditions. The explanation for these structural differences must lie in details of how initial nucleation takes place in MBE and MEE. For thicker films (≂2 μm) no significant differences in structural or electrical properties were found for the two methods.
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