Epitaxial SrTiO3thin films were prepared using low pressure metalorganic chemical vapor deposition. The volatile metalorganic precursors employed were Sr(hexafluoroacetyl acetonate)2⋅tetraglyme and titanium tetraisopropoxide. Single‐phase, epitaxial films were deposited on (100)LaAlO3at a temperature of 810 °C. In‐plane epitaxy was verified using x‐ray phi scan analysis. The SrTiO3films exhibit a significant tetragonal distortion with c/a=1.010(±1.6×10−4) at room temperature. No evidence of fluorine contamination is noted by x‐ray diffraction or by Auger electron spectroscopy measurements. ©1995 American Institute of Physics.