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Pressure dependence of ionization efficiency in sputtering magnetrons

 

作者: T. E. Sheridan,   M. J. Goeckner,   J. Goree,  

 

期刊: Applied Physics Letters  (AIP Available online 1990)
卷期: Volume 57, issue 20  

页码: 2080-2082

 

ISSN:0003-6951

 

年代: 1990

 

DOI:10.1063/1.103947

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Using a Monte Carlo simulation, we show how electron confinement allows sputtering magnetrons to operate at lower neutral pressures than similar unmagnetized devices. We find that at both high and low pressures, the ionization efficiency in a magnetron is constant, and it varies by only 40% between the two regimes. In contrast, the efficiency of an unmagnetized discharge varies linearly with pressure, becoming very small at low pressures.

 

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