Pressure dependence of ionization efficiency in sputtering magnetrons
作者:
T. E. Sheridan,
M. J. Goeckner,
J. Goree,
期刊:
Applied Physics Letters
(AIP Available online 1990)
卷期:
Volume 57,
issue 20
页码: 2080-2082
ISSN:0003-6951
年代: 1990
DOI:10.1063/1.103947
出版商: AIP
数据来源: AIP
摘要:
Using a Monte Carlo simulation, we show how electron confinement allows sputtering magnetrons to operate at lower neutral pressures than similar unmagnetized devices. We find that at both high and low pressures, the ionization efficiency in a magnetron is constant, and it varies by only 40% between the two regimes. In contrast, the efficiency of an unmagnetized discharge varies linearly with pressure, becoming very small at low pressures.
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