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Laser chemical vapor deposition of gold: Part II

 

作者: Thomas H. Baum,   Carol R. Jones,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  （AIP Available online 1986）
卷期: Volume 4, issue 5  

页码: 1187-1191

 

ISSN:0734-211X

 

年代: 1986

 

DOI:10.1116/1.583481

 

出版商: American Vacuum Society

 

关键词: CHEMICAL VAPOR DEPOSITION;GOLD;CRYSTAL STRUCTURE;ELECTRIC CONDUCTIVITY;ORGANOMETALLIC COMPOUNDS;LASER RADIATION;Au

 

数据来源: AIP

 

摘要:

The laser‐induced pyrolytic deposition (LCVD) of high purity gold metal is discussed. The effects of laser flux and cell temperature are examined for the deposition process. Rates of deposition, resistivities, and deposit quality are highlighted.

 

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