Electron heating in low‐pressure rf glow discharges
作者:
M. Surendra,
D. B. Graves,
I. J. Morey,
期刊:
Applied Physics Letters
(AIP Available online 1990)
卷期:
Volume 56,
issue 11
页码: 1022-1024
ISSN:0003-6951
年代: 1990
DOI:10.1063/1.102604
出版商: AIP
数据来源: AIP
摘要:
Particle‐in‐cell simulations of radio frequency glow discharges between parallel‐plate electrodes were performed to test the role of secondary emission at applied frequencies above the ion plasma frequency. With the secondary electron emission coefficient set to zero, the high‐energy tail of the electron energy distribution function in the center of the glow is modulated at the applied frequency, and these energetic electrons show substantial anisotropy. In addition, a pulse of ionization propagates across the glow, correpsonding to the directed velocity of the high‐energy electrons in the center of the glow. These high‐energy electrons originate at the plasma‐sheath boundary and appear to be the result of sheath heating.
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