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Dual electron beam evaporator for the preparation of composition‐modulated structures

 

作者: H. Q. Yang,   H. K. Wong,   J. Q. Zheng,   J. B. Ketterson,   J. E. Hilliard,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  （AIP Available online 1984）
卷期: Volume 2, issue 1  

页码: 1-4

 

ISSN:0734-2101

 

年代: 1984

 

DOI:10.1116/1.572618

 

出版商: American Vacuum Society

 

关键词: electron beam evaporation;electron guns;modulation;thin films;vanadium;iron;coatings;evaporators;fabrication;design;quality control;vacuum coating;vacuum evaporation;V;Fe

 

数据来源: AIP

 

摘要:

We describe the construction of an UHV evaporator with two electron beam guns and a heated substrate turntable which is used for the preparation of composition‐modulated structures (CMS’s). Using a suitably controlled stepping motor, up to 20 different CMS’s can be prepared in the same run. The system has been used to deposit V/Fe CMS’s and preliminary structural measurements indicate the samples are of high quality.

 

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