Determination of unknown stress states in silicon wafers using microlaser Raman spectroscopy
作者:
S. Narayanan,
Surya R. Kalidindi,
Linda S. Schadler,
期刊:
Journal of Applied Physics
(AIP Available online 1997)
卷期:
Volume 82,
issue 5
页码: 2595-2602
ISSN:0021-8979
年代: 1997
DOI:10.1063/1.366072
出版商: AIP
数据来源: AIP
摘要:
A new technique was developed to predict the unknown in-plane stress state and the magnitude of the stress components in (111) silicon wafers using micro-Raman spectroscopy. The approach is based on analyzing the combined signal from the initially degenerate peaks of theF2gmode in silicon as a function of the angle between the incident laser polarization and the polarization selected from the scattered beam using an analyzer. The peak position of the combined signal when plotted as a function of the angle was found to contain the information required to estimate the magnitude of the individual stress components in the plane-stress condition. The development of this technique is described in this paper for (111) silicon wafers. ©1997 American Institute of Physics.
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