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Double patterns in reflection high energy electron diffraction for thin film structure observations

 

作者: G. Vitali,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1976)
卷期: Volume 47, issue 5  

页码: 542-544

 

ISSN:0034-6748

 

年代: 1976

 

DOI:10.1063/1.1134686

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A new technique to obtain reflection high energy electron diffraction (RHEED) double patterns has been developed. This technique has allowed us to obtain simultaneously the RHEED patterns of a thin film and of the single crystal substrate on which the same thin film has been grown. It is possible to have an identification and a relative calibration, on the same exposure, of the crystalline parameters of the film under observation utilizing the simultaneous diffraction pattern of the substrate.

 

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