In this paper we report two‐ and three‐body quenching of the XeF* (B2&Sgr;+1/2) state by Ar and Xe. The rate constants were obtained by analyzing the dependence of (B2&Sgr;+1/2→X2&Sgr;+1/2) radiation on the partial pressures of Ar, Xe, and F2. The XeF* was produced by a high‐energy e‐beam. We have determined the two‐ and three‐body quenching rates by Ar to be 8±4×10−13cm3/sec and 1.5±0.5×10−32cm6/sec. Xe quenches XeF* with a three‐body rate constant of 3±1.5 ×10−31cm6/sec; the third body was mainly argon.