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High frequency dielectric properties of thin-film PZT capacitors

 

作者: W.Williamson Iii,   B.K. Gilbert,   H.D. Chen,   K.R. Udayakumar,   L.E. Cross,   C.M. Bozler,  

 

期刊: Integrated Ferroelectrics  (Taylor Available online 1995)
卷期: Volume 10, issue 1-4  

页码: 335-342

 

ISSN:1058-4587

 

年代: 1995

 

DOI:10.1080/10584589508012291

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

We present a method for calculating the dielectric constant and the dissipation factor for thin-film ferroelectric capacitors from scattering parameter measurements at multi-gigahertz frequencies. Physical measurement is discussed along with description of the model upon which the calculation is based. Experimental results for 0.5 micron films of PZT are reported up to 15 GHz. Direct measurement is compared with indirectly calculated values at the 100 MHz to 1.5 GHz range, showing excellent agreement.

 

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