High frequency dielectric properties of thin-film PZT capacitors
作者:
W.Williamson Iii,
B.K. Gilbert,
H.D. Chen,
K.R. Udayakumar,
L.E. Cross,
C.M. Bozler,
期刊:
Integrated Ferroelectrics
(Taylor Available online 1995)
卷期:
Volume 10,
issue 1-4
页码: 335-342
ISSN:1058-4587
年代: 1995
DOI:10.1080/10584589508012291
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
We present a method for calculating the dielectric constant and the dissipation factor for thin-film ferroelectric capacitors from scattering parameter measurements at multi-gigahertz frequencies. Physical measurement is discussed along with description of the model upon which the calculation is based. Experimental results for 0.5 micron films of PZT are reported up to 15 GHz. Direct measurement is compared with indirectly calculated values at the 100 MHz to 1.5 GHz range, showing excellent agreement.
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