Gas source molecular beam epitaxy of wurtzite GaN on sapphire substrates using GaN buffer layers
作者:
N. Grandjean,
M. Leroux,
M. Lau¨gt,
J. Massies,
期刊:
Applied Physics Letters
(AIP Available online 1997)
卷期:
Volume 71,
issue 2
页码: 240-242
ISSN:0003-6951
年代: 1997
DOI:10.1063/1.119526
出版商: AIP
数据来源: AIP
摘要:
Wurtzite GaN was grown by gas source molecular beam epitaxy on (0001) sapphire substrates. Taking advantage of the catalytic decomposition of ammonia on the growing surface, high growth rates (>1 &mgr;m/h) were achieved for substrate temperatures ranging between 800 and 850 °C. Surface morphology, structural, and optical properties of thick (2–4 &mgr;m) GaN films were investigatedversusthe growth temperature of the GaN buffer layer. It is shown that this parameter has a drastic influence on the GaN properties. ©1997 American Institute of Physics.
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