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Gas source molecular beam epitaxy of wurtzite GaN on sapphire substrates using GaN buffer layers

 

作者: N. Grandjean,   M. Leroux,   M. Lau¨gt,   J. Massies,  

 

期刊: Applied Physics Letters  (AIP Available online 1997)
卷期: Volume 71, issue 2  

页码: 240-242

 

ISSN:0003-6951

 

年代: 1997

 

DOI:10.1063/1.119526

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Wurtzite GaN was grown by gas source molecular beam epitaxy on (0001) sapphire substrates. Taking advantage of the catalytic decomposition of ammonia on the growing surface, high growth rates (>1 &mgr;m/h) were achieved for substrate temperatures ranging between 800 and 850 °C. Surface morphology, structural, and optical properties of thick (2–4 &mgr;m) GaN films were investigatedversusthe growth temperature of the GaN buffer layer. It is shown that this parameter has a drastic influence on the GaN properties. ©1997 American Institute of Physics.

 

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