Surface Characteristics and Electrical Conduction of β-SiC Films Formed by Chemical Conversion
作者:
K. E. Haq,
I. H. Khan,
期刊:
Journal of Vacuum Science and Technology
(AIP Available online 1970)
卷期:
Volume 7,
issue 4
页码: 490-493
ISSN:0022-5355
年代: 1970
DOI:10.1116/1.1315373
出版商: American Vacuum Society
数据来源: AIP
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