Doping effects in zone‐melting recrystallization of silicon thin films
作者:
Si‐Woo Lee,
Seung‐Ki Joo,
期刊:
Journal of Applied Physics
(AIP Available online 1995)
卷期:
Volume 77,
issue 11
页码: 6000-6005
ISSN:0021-8979
年代: 1995
DOI:10.1063/1.359184
出版商: AIP
数据来源: AIP
摘要:
Effects of dopant additions on interface stability in zone‐melting recrystallization (ZMR) of silicon thin films have been investigated through computer simulation and experiments. The computer simulation has shown that a critical scanning speedV* exists such that the critical wavelength &lgr;* of the solidifying interface increases with scanning speed belowV* due to radiative supercooling, while &lgr;* decreases with scanning speed aboveV* due to constitutional supercooling. Experiments determined thatV* decreased with additions of B and P, which was expected from the results of the computer simulation. The primary defect spacings after ZMR was found to increase with the addition of dopants prior to ZMR. ©1995 American Institute of Physics.
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