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Doping effects in zone‐melting recrystallization of silicon thin films

 

作者: Si‐Woo Lee,   Seung‐Ki Joo,  

 

期刊: Journal of Applied Physics  (AIP Available online 1995)
卷期: Volume 77, issue 11  

页码: 6000-6005

 

ISSN:0021-8979

 

年代: 1995

 

DOI:10.1063/1.359184

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Effects of dopant additions on interface stability in zone‐melting recrystallization (ZMR) of silicon thin films have been investigated through computer simulation and experiments. The computer simulation has shown that a critical scanning speedV* exists such that the critical wavelength &lgr;* of the solidifying interface increases with scanning speed belowV* due to radiative supercooling, while &lgr;* decreases with scanning speed aboveV* due to constitutional supercooling. Experiments determined thatV* decreased with additions of B and P, which was expected from the results of the computer simulation. The primary defect spacings after ZMR was found to increase with the addition of dopants prior to ZMR. ©1995 American Institute of Physics.

 

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