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Precision micropositioning using acoustic surface wave variable delay lines

 

作者: J. P. Baker,   M. Epstein,   A. P. van den Heuvel,  

 

期刊: Review of Scientific Instruments  （AIP Available online 1974）
卷期: Volume 45, issue 1  

页码: 25-27

 

ISSN:0034-6748

 

年代: 1974

 

DOI:10.1063/1.1686441

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Phase comparison in an acoustic surface wave variable delay line is utilized to indicate precise micropositioning over distances of several centimeters. A special phase‐locked loop design provides thermal compensation to render a device capable of repeatable measurements with accuracies of better than 0.5 &mgr;.

 

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