Growth, characterization, and properties of metastable and modulated semiconductor structures: Prospects for future studies
作者:
F. J. Grunthaner,
A. Madhukar,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1983)
卷期:
Volume 1,
issue 2
页码: 462-467
ISSN:0734-211X
年代: 1983
DOI:10.1116/1.582628
出版商: American Vacuum Society
关键词: growth;metastable phases;semiconductor materials;synthesis;optical properties;electrical properties;solid structure;chemical properties;crystal structure;fabrication
数据来源: AIP
摘要:
The general field of preparation and study of metastable and modulated semiconductor structures has progressed rapidly in recent years. This short overview offers an assessment of the progress and current understanding in the areas of fabrication, characterization, and utilization of these new material system. The discussion includes the more prominent growth techniques, theoretical and experimental analysis of growth kinetics, and an overview of structural, chemical, electronic, and optical characterization. The probable application of these structures for the technological development of new device structures and concepts is considered. The discussion particularly emphasizes the prospects for future studies in view of the specific current understanding.
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