Surface reactions in the decomposition of dimethylzinc on Si(100)‐2×1
作者:
M. A. Rueter,
J. M. Vohs,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1991)
卷期:
Volume 9,
issue 6
页码: 2916-2922
ISSN:0734-2101
年代: 1991
DOI:10.1116/1.577151
出版商: American Vacuum Society
关键词: SILICON;SURFACE REACTIONS;ORGANOMETALLIC COMPOUNDS;ZINC COMPOUNDS;METHYL COMPOUNDS;MEDIUM TEMPERATURE;HIGH TEMPERATURE;ADSORPTION;DEHYDROGENATION;SORPTIVE PROPERTIES;ENERGY−LOSS SPECTROSCOPY;DECOMPOSITION;Si;(CH3)2Zn
数据来源: AIP
摘要:
The reaction of dimethylzinc on Si(100)‐2×1 was studied using temperature programmed desorption (TPD) and high resolution electron energy loss spectroscopy (HREELS). Dimethylzinc dissociated on this surface at temperatures less than 400 K producing zinc metal and surface methyl groups. During TPD experiments the zinc metal desorbed completely by 600 K, leaving only methyl groups on the surface at higher temperatures. The predominate decomposition pathway for the surface methyl species was complete dehydrogenation producing molecular hydrogen and depositing carbon on the surface. HREELS results indicated that methyl group dehydrogenation occurred at temperatures greater than 700 K. For high initial coverages of dimethylzinc, in addition to complete dehydrogenation products, methyl radicals and acetylene were also detected. The hydrogen desorption temperature was found to increase as a function of the amount of carbon deposited on the surface.
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