Orientation dependance of arsenic incorporation in metalorganic chemical‐vapor deposition‐grown HgCdTe
作者:
J. Elliott,
V. G. Kreismanis,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1992)
卷期:
Volume 10,
issue 4
页码: 1428-1431
ISSN:1071-1023
年代: 1992
DOI:10.1116/1.586266
出版商: American Vacuum Society
关键词: MERCURY TELLURIDES;CADMIUM TELLURIDES;ORIENTATION;CRYSTAL DOPING;ANNEALING;ARSENIC ADDITIONS;CHEMICAL VAPOR DEPOSITION;EPITAXIAL LAYERS;CARRIER MOBILITY;CARRIER DENSITY;TERNARY COMPOUNDS;(Hg,Cd)Te:As
数据来源: AIP
摘要:
The influence of substrate orientation onp‐type doping was investigated on three different CdTe crystallographic orientations: (111)B, (111)A4°→(110), and (100)4°→(110). Teritarybutylarsenic was used as thep‐type dopant source in a conventional, atmospheric pressure direct alloy growth metalorganic chemical‐vapor deposition growth process. Hall measurements on annealed baseline undoped growths showed high mobility and low carrier concentration material on all three orientations. At high Hg/Te ratios, it was possible to dope the (111)B to the low 1016/cm3range and the (111)A4°→(110) and (100)4°→(110) to the low 1017/cm3range.
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