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Orientation dependance of arsenic incorporation in metalorganic chemical‐vapor deposition‐grown HgCdTe

 

作者: J. Elliott,   V. G. Kreismanis,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1992)
卷期: Volume 10, issue 4  

页码: 1428-1431

 

ISSN:1071-1023

 

年代: 1992

 

DOI:10.1116/1.586266

 

出版商: American Vacuum Society

 

关键词: MERCURY TELLURIDES;CADMIUM TELLURIDES;ORIENTATION;CRYSTAL DOPING;ANNEALING;ARSENIC ADDITIONS;CHEMICAL VAPOR DEPOSITION;EPITAXIAL LAYERS;CARRIER MOBILITY;CARRIER DENSITY;TERNARY COMPOUNDS;(Hg,Cd)Te:As

 

数据来源: AIP

 

摘要:

The influence of substrate orientation onp‐type doping was investigated on three different CdTe crystallographic orientations: (111)B, (111)A4°→(110), and (100)4°→(110). Teritarybutylarsenic was used as thep‐type dopant source in a conventional, atmospheric pressure direct alloy growth metalorganic chemical‐vapor deposition growth process. Hall measurements on annealed baseline undoped growths showed high mobility and low carrier concentration material on all three orientations. At high Hg/Te ratios, it was possible to dope the (111)B to the low 1016/cm3range and the (111)A4°→(110) and (100)4°→(110) to the low 1017/cm3range.

 

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