Amorphous silicon‐silicon nitride thin‐film transistors
作者:
M. J. Powell,
B. C. Easton,
O. F. Hill,
期刊:
Applied Physics Letters
(AIP Available online 1981)
卷期:
Volume 38,
issue 10
页码: 794-796
ISSN:0003-6951
年代: 1981
DOI:10.1063/1.92166
出版商: AIP
数据来源: AIP
摘要:
A thin‐film field‐effect transistor has been fabricated using glow‐discharge amorphous silicon as the semiconductor and silicon nitride as the insulator. The transistor operates in the electron (ntype) accumulation mode and by changing the gate potential from zero to only 3 V a change in the source‐drain conductance of greater than four orders of magnitude is obtained. The results imply upper limits to the density of gap states in amorphous silicon and interface states at the amorphous silicon‐silicon nitride interface of 3×1016cm−3 eV−1and 5×1011cm−2 eV−1, respectively.
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