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Simple planar magnetron sputtering source

 

作者: R. S. Rastogi,   V. D. Vankar,   K. L. Chopra,  

 

期刊: Review of Scientific Instruments  （AIP Available online 1987）
卷期: Volume 58, issue 8  

页码: 1505-1506

 

ISSN:0034-6748

 

年代: 1987

 

DOI:10.1063/1.1139388

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The design and performance of a simple and efficient planar magnetron sputtering source using demountable targets are described. The design of the source enables sputtering of magnetic and nonmagnetic materials with equal ease.

 

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