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Memories, CCD microprocessors, and pyroelectric detectors based upon sol-gel ceramic ferroelectric films

 

作者: Alexander Sigov,  

 

期刊: Integrated Ferroelectrics  （Taylor Available online 1995）
卷期: Volume 9, issue 1-3  

页码: 143-150

 

ISSN:1058-4587

 

年代: 1995

 

DOI:10.1080/10584589508012918

 

出版商: Taylor & Francis Group

 

关键词: Keywords:;Ferroelectric thin films;sol-gel method;PZT;microelectronics

 

数据来源: Taylor

 

摘要:

The integration of PZT ceramic thin films into the current technology of silicon-based integrated circuits is discussed. The most widespread and obvious applications are considered: memory ICs, parallel analog processors, and pyroelectric detectors.

 

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