Nonevaporable getter films for ultrahigh vacuum applications
作者:
C. Benvenuti,
P. Chiggiato,
F. Cicoira,
Y. L’Aminot,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1998)
卷期:
Volume 16,
issue 1
页码: 148-154
ISSN:0734-2101
年代: 1998
DOI:10.1116/1.580963
出版商: American Vacuum Society
数据来源: AIP
摘要:
The vacuum behavior of stainless steel vacuum chambers,ex situsputter coated with a thin film(∼1 μm)of getter material, has been studied to determine if after air exposure the getter film could be activated by a bakeout so as to transform the coated vacuum chamber into a pump. The materials studied so far are Ti, Zr, Hf, and some of their binary alloys. They all display an activation temperature lower than 400 °C, i.e., within the reach of the baking temperature of stainless steel vacuum chambers. The lowest activation temperature of 200–250 °C, measured for an equiatomic alloy of Ti and Zr, allows extension of this method to chambers made of copper and aluminum alloys. The experimental results, described here in detail, indicate that the values of the activation temperature obtained using electron stimulated desorption, pumping speed, and Auger spectroscopy measurements are self-consistent.
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