Preparation of PbTiO3thin films at low temperature by an excimer laser ablation technique
作者:
Hitoshi Tabata,
Tomoji Kawai,
Shichio Kawai,
Osamu Murata,
Junzo Fujioka,
Shun‐ichi Minakata,
期刊:
Applied Physics Letters
(AIP Available online 1991)
卷期:
Volume 59,
issue 19
页码: 2354-2356
ISSN:0003-6951
年代: 1991
DOI:10.1063/1.106038
出版商: AIP
数据来源: AIP
摘要:
We have formed PbTiO3thin films on (100) SrTiO3substrates at a temperature of 350 °C using an ArF excimer laser ablation technique. Until now, PbTiO3films have not been formed at temperatures lower than 500 °C using other thin‐film techniques. The important points in the present study are the laser excitation of the substrate during the film growth and the lattice matching between the film and the substrate. The film deposited on the SrTiO3substrate shows preferential orientation of thec‐axis perpendicular to the substrate surface.
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