Explosive crystallization of amorphous Si3N4films on silicon during silicon laser melting
作者:
G. J. Willems,
D. J. Wouters,
H. E. Maes,
期刊:
Journal of Applied Physics
(AIP Available online 1993)
卷期:
Volume 74,
issue 8
页码: 5196-5202
ISSN:0021-8979
年代: 1993
DOI:10.1063/1.354258
出版商: AIP
数据来源: AIP
摘要:
The explosive crystallization of Si3N4layers deposited on silicon samples during laser melting of the silicon is investigated. The crystallization threshold is defined as the minimal laser‐beam power to start crystallization. The precipitate‐initiator hypothesis which states that the explosive crystallization is initiated by the formation of Si3N4precipitates in the molten zone is formulated. Based on this hypothesis the dependency of the crystallization threshold on the scan conditions and the sample structure can be completely and consistently explained. Methods to prevent crystallization are formulated.
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