首页   按字顺浏览 期刊浏览 卷期浏览 Explosive crystallization of amorphous Si3N4films on silicon during silicon laser melti...
Explosive crystallization of amorphous Si3N4films on silicon during silicon laser melting

 

作者: G. J. Willems,   D. J. Wouters,   H. E. Maes,  

 

期刊: Journal of Applied Physics  (AIP Available online 1993)
卷期: Volume 74, issue 8  

页码: 5196-5202

 

ISSN:0021-8979

 

年代: 1993

 

DOI:10.1063/1.354258

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The explosive crystallization of Si3N4layers deposited on silicon samples during laser melting of the silicon is investigated. The crystallization threshold is defined as the minimal laser‐beam power to start crystallization. The precipitate‐initiator hypothesis which states that the explosive crystallization is initiated by the formation of Si3N4precipitates in the molten zone is formulated. Based on this hypothesis the dependency of the crystallization threshold on the scan conditions and the sample structure can be completely and consistently explained. Methods to prevent crystallization are formulated.

 

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