The determination of interfacial and bulk properties of gold in m.o.s. structures using quasiequilibrium and non-steady-state linear voltage-ramp techniques
作者:
L.Faraone,
A.G.Nassibian,
J.G.Simmons,
期刊:
IEE Journal on Solid-State and Electron Devices
(IET Available online 1979)
卷期:
Volume 3,
issue 5
页码: 121-126
年代: 1979
DOI:10.1049/ij-ssed.1979.0026
出版商: IEE
数据来源: IET
摘要:
The effect of gold recombination centres on the trapping state at the Si-SiO2interface, and in the bulk, has been studied. The technique involves applying a linear voltage-ramp to the m.o.s. device and measuring the resultingI/Vcharacteristic. From the quasiequilibriumI/Vcurves, it is apparent that gold-doping produces a pronounced peak in the interfacial trap distribution occuring at energyEv+ 0.6eV with a density ofNss= 2.5 × 1011(cm2eV)−1. Subsequent non-steady-stateI/Vmeasurements are used to study the bulk recombination properties of gold, and thus determine a value for the capture cross-section (σp≃ 1.1 × 10−15cm2).
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