Germanium thin films were formed on flexible organic substrates by using a replica method, in order to obtain a sensitive transducer for stress and thermal energy. The average values of measured gauge factor were in the range from 45 to 65. The Seebeck coefficient was up to 560 &mgr;V/deg forp‐type films. With regard to flexibility of the films, stiffness is more than three orders of magnitude smaller than that of a glass substrate. According to dynamic tests, the element attached to a beam could respond to mechanical vibrations up to a frequency of 20 kHz. From the study of the thermal properties using infrared and laser beams, a response time of about 100 msec or less and a responsiveness of about 40&mgr;V/&mgr;W were obtained.