In this letter, a method to calibrate sensitivity for the three‐dimensional displacement ofX,Y, andZdirections by using the novel force curve, namely lateral force curve, as well as vertical force curve in atomic force/lateral force microscope (AFM/LFM) measurement is described. Furthermore, from quantized friction measurement based on the two‐dimensional stick–slip model, it is experimentally confirmed that this lateral force curve calibration is reasonable. ©1995 American Institute of Physics.