Fabrication of overpass microstructures in GaAs using isotropic reactive ion etching

 

作者: Katerina Y. Hur,   Richard C. Compton,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  （AIP Available online 1992）
卷期: Volume 10, issue 6  

页码: 2486-2487

 

ISSN:1071-1023

 

年代: 1992

 

DOI:10.1116/1.586043

 

出版商: American Vacuum Society

 

关键词: FABRICATION;MICROELECTRONICS;ETCHING;GALLIUM ARSENIDES;LITHOGRAPHY;INTEGRATED CIRCUITS;GaAs

 

数据来源: AIP

 

摘要:

 

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