Dopant redistribution in silicides: Materials and process issues
作者:
C. B. Cooper,
R. A. Powell,
R. Chow,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1984)
卷期:
Volume 2,
issue 4
页码: 718-722
ISSN:0734-211X
年代: 1984
DOI:10.1116/1.582868
出版商: American Vacuum Society
关键词: DOPING PROFILES;CRYSTAL DOPING;SILICIDES;DIFFUSION;SINTERING;HEAT TREATMENTS;ANNEALING;REFRACTORY METALS;REVIEWS;VLSI;STABILITY;GATES;ELECTRODES;SILICON;POLYCRYSTALS;silicides
数据来源: AIP
摘要:
The need to understand dopant redistribution in refractory metal silicides is important for reliable fabrication of polycide gates and other silicide‐containing structures in VLSI devices. This paper will review work on dopant redistribution in silicides with emphasis on polycide structures. Of particular concern is the high‐temperature sintering step required to form stable silicide and polycide structures. Results from conventional furnace sintering indicate that dopants can diffuse rapidly through certain silicides. The use of rapid thermal processing techniques to minimize dopant redistribution during the sintering step will also be reviewed. One conclusion is that our understanding of dopant redistribution in refractory metal silicides is limited and additional studies are required.
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