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Growth of BaTiO3/SrTiO3superlattices by injection MOCVD

 

作者: J. Lindner,   F. Weiss,   J.P. Senateur,   W. Haessler,   G. Köbernik,   S. Oswald,   A. Figueras,   J. Santiso,  

 

期刊: Integrated Ferroelectrics  （Taylor Available online 2000）
卷期: Volume 30, issue 1-4  

页码: 53-59

 

ISSN:1058-4587

 

年代: 2000

 

DOI:10.1080/10584580008222253

 

出版商: Taylor & Francis Group

 

关键词: Injection MOCVD;Films;BaxSr1-xTiO3;Superlattices;X-ray

 

数据来源: Taylor

 

摘要:

BaTiO3(BTO) and SrTiO3(STO) and BaxSr1-xTiO3(x=0–1) (BST) thin films have been epitaxially grown on LaAlO3and SrTiO3:Nb at a substrate temperature of 800°C using a new liquid source delivery technique called injection MOCVD. A X-ray study evidenced FWHMs of 0.16° and 0.45° for SrTiO3and BaTiO3respectively.

 

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