Clean ultrahigh vacuum system with single‐structure diffusion pumps
作者:
T. J. Gay,
J. A. Brand,
M. C. Fritts,
J. E. Furst,
M. A. Khakoo,
E. R. Mell,
M. T. Sieger,
W. M. K. P. Wijayaratna,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1994)
卷期:
Volume 12,
issue 5
页码: 2903-2910
ISSN:0734-2101
年代: 1994
DOI:10.1116/1.578963
出版商: American Vacuum Society
关键词: VACUUM SYSTEMS;VACUUM PUMPS;DIFFUSION;ULTRAHIGH VACUUM;HYDROCARBONS;TEMPERATURE RANGE 65−273 K;DESIGN;REVIEWS
数据来源: AIP
摘要:
A practical example of the use of single‐structure diffusion pumping groups in an experiment requiring hydrocarbon‐free, ultrahigh vacuum is presented. With the use of proper vacuum procedures and careful foreline design and operation, but with no exotic hardware or liquid nitrogen, we have demonstrated that such a pump could provide vacuum that was ‘‘clean,’’ i.e., which had no residual pump‐oil contamination to a partial pressure below 10−8mbar. Their use is thus compatible, at least in peripheral vacuum chambers, with standard ‘‘UHV‐surface science’’ processes. We discuss our vacuum system in detail, and present a review of the literature on the production of clean vacua with diffusion pumps.
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