A side extraction PIG ion source with a permanent magnet is introduced, which can be used not only for producing miliampere positive ion beams, but also for direct extraction of negative ions of some elements with larger electron affinity. So far H, O, and F negative ions have been extracted from the source. At −15 kV extraction voltage, O−ion beams of 130 &mgr;A and a F−ion beam of 75 &mgr;A are extracted, and the discharge power consumption is 110 and 280 W, respectively. ©1996 American Institute of Physics.