YBa2Cu3O7films can be grown on different substrates by the off‐axis ac magnetron sputtering method. Films in theaborientation tend to grow at a lower substrate temperature thanc‐axis films. However, as the temperature is lowered, all the substrates we have tested, except for SrTiO3, form amorphous phases that degrade the quality of the films being made. In this manuscript it is shown that if a thin layer ofc‐axis film is deposited on the substrate first, then it effectively reduces the formation of the amorphous phases and improves the film quality significantly.