Tellurium in silicon
作者:
G.J. Kemerink,
D.O. Boerma,
H. De Waard,
L. Niesen,
期刊:
Radiation Effects
(Taylor Available online 1983)
卷期:
Volume 69,
issue 1-2
页码: 83-99
ISSN:0033-7579
年代: 1983
DOI:10.1080/00337578308221727
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
After pulsed ruby laser annealing of tellurium implanted silicon considerable impurity redistribution is observed with little surface segregation. In the bulk, substitutional fractions of 85-90% are found, independent of the Te-concentration or the presence of phosphorus or boron. Computer simulations show that the slight narrowing of the Te-yield curves can be accounted for by the Te-vibrational amplitudes. The displacement cross-section of substitutional Te-atoms in laser annealed silicon for 2 MeV He+-ions is determined as 5.6(20) × 10−21cm2. In contrast to pulsed laser annealing, oven annealing results in strongly narrowed Te-yield curves with a high minimum yield, indicating a small true substitutional impurity fraction.
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