A simple model for low energy ion-solid interactions
作者:
S. Mohajerzadeh,
C. R. Selvakumar,
期刊:
Journal of Applied Physics
(AIP Available online 1997)
卷期:
Volume 81,
issue 7
页码: 3003-3006
ISSN:0021-8979
年代: 1997
DOI:10.1063/1.364334
出版商: AIP
数据来源: AIP
摘要:
A simple analytical model for ion-solid interactions, suitable for low energy beam depositions, is reported. An approximation for the nuclear stopping power is used to obtain the analytic solution for the deposited energy in the solid. The ratio of the deposited energy in the bulk to the energy deposited in the surface yields a ceiling for the beam energy above which more defects are generated in the bulk resulting in defective films. The numerical evaluations agree with the existing results in the literature. ©1997 American Institute of Physics.
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