Electro‐optical properties of InGaAs layers grown by hydride vapour phase epitaxy
作者:
G. Attolini,
C. Bocchi,
R. Fornari,
C. Pelosi,
J. Oswald,
J. Pastrnak,
期刊:
Crystal Research and Technology
(WILEY Available online 1990)
卷期:
Volume 25,
issue 1
页码: 25-30
ISSN:0232-1300
年代: 1990
DOI:10.1002/crat.2170250107
出版商: WILEY‐VCH Verlag
数据来源: WILEY
摘要:
AbstractA series of epitaxial layers of the InGaAs alloy were deposited on (001) oriented InP substrates by using hydride VPE technique. The layers were characterized by Double Crystal Diffractometry (DCD), Photoluminescence (PL), Hall effect and Capacitance‐Voltage (C‐V) measurements. The growth parameters and the quality of the grown layers are discussed on the basis of electrical and structural data analy
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