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Heteroepitaxial growth of LiTaO3thin films by pyrosol process

 

作者: V. Bornand,   D. Chateigner,   Ph. Papet,   E. Philippot,  

 

期刊: Integrated Ferroelectrics  （Taylor Available online 1998）
卷期: Volume 19, issue 1-4  

页码: 1-10

 

ISSN:1058-4587

 

年代: 1998

 

DOI:10.1080/10584589808012692

 

出版商: Taylor & Francis Group

 

关键词: LiTaO3thin films;chemical vapour deposition;deposition process;pyrolysis;X-ray diffraction

 

数据来源: Taylor

 

摘要:

Highly oriented LiTaO3thin films were grown on (001) sapphire substrates by pyrosol process. X-ray diffraction analysis shows that the LiTaO3crystallitec-axis is normal to the sapphire substrate. X-ray pole figures reveal that the films are also in-plane oriented, with two components of heteroepitaxy, the main one being stabilized with the (110) axes of the layer parallel to the [110] direction of the substrate. Texture components are quantified.

 

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