Selective Pumping of Light and Heavy Gases with a Molecular Pump
作者:
E. Apgar,
G. Lewin,
D. Mullaney,
期刊:
Review of Scientific Instruments
(AIP Available online 1962)
卷期:
Volume 33,
issue 9
页码: 985-986
ISSN:0034-6748
年代: 1962
DOI:10.1063/1.1718046
出版商: AIP
数据来源: AIP
摘要:
For some plasma experiments high purity hydrogen or deuterium at pressures of 10−3Torr or less is required. It is shown that a molecular pump can be used as a combination pumping, gas injection, and gas purification system. The gas is admitted to the fore vacuum side and streams back to the high vacuum side. This does not materially affect the pumping of heavy impurities. Performance data for this mode of operation are given for the Pfeiffer pump TVP‐500.
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