首页   按字顺浏览 期刊浏览 卷期浏览 Selective Pumping of Light and Heavy Gases with a Molecular Pump
Selective Pumping of Light and Heavy Gases with a Molecular Pump

 

作者: E. Apgar,   G. Lewin,   D. Mullaney,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1962)
卷期: Volume 33, issue 9  

页码: 985-986

 

ISSN:0034-6748

 

年代: 1962

 

DOI:10.1063/1.1718046

 

出版商: AIP

 

数据来源: AIP

 

摘要:

For some plasma experiments high purity hydrogen or deuterium at pressures of 10−3Torr or less is required. It is shown that a molecular pump can be used as a combination pumping, gas injection, and gas purification system. The gas is admitted to the fore vacuum side and streams back to the high vacuum side. This does not materially affect the pumping of heavy impurities. Performance data for this mode of operation are given for the Pfeiffer pump TVP‐500.

 

点击下载:  PDF (150KB)



返 回