We report on the growth of superconducting Nb-dopedSrTiO3thin films onLaAlO3substrates by pulsed laser deposition. We find optimum Nb doping and high mobility for growth near 870 °C and chamber pressures below3×10−4Pa (2×10−6Torr). The transport properties were measured from 300 K to 150 mK. The most highly doped samples display metallic behavior, and are superconducting below 350 mK, with transition temperatures similar to those of bulk single crystals. ©1998 American Institute of Physics.