Formation of a solid lubricant in boron carbide by nitrogen ion implantation and laser annealing
作者:
Robert R. Reeber,
Robert P. Kusy,
Ning Yu,
Wei‐Kan Chu,
期刊:
Applied Physics Letters
(AIP Available online 1990)
卷期:
Volume 56,
issue 11
页码: 1075-1077
ISSN:0003-6951
年代: 1990
DOI:10.1063/1.102570
出版商: AIP
数据来源: AIP
摘要:
A boron nitride(lubricant)/boron carbide composite (approximately 70% boron nitride) has been formed in approximately the first 750 A˚ of surface and near‐surface regions of a polycrystalline boron carbide sample by implanting nitrogen (N) ions at 100 keV with a total dose of 4×1017N ions/cm2followed by xenon chloride laser annealing. The composition and the profile of the boron, carbon, and nitrogen in the sample at various stages were determined by Rutherford backscattering spectrometry. During laser annealing, the deeply implanted N atoms diffused back toward the heated surface with about 50% of them remaining in the near‐surface region. Argon sputtering and x‐ray photoelectron spectroscopy measurements confirmed the formation and distribution of boron nitride.
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