High‐vacuum versus ‘‘environmental’’ electron beam deposition
作者:
Albert Folch,
Jordi Servat,
Joan Esteve,
Javier Tejada,
Miquel Seco,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1996)
卷期:
Volume 14,
issue 4
页码: 2609-2614
ISSN:1071-1023
年代: 1996
DOI:10.1116/1.588994
出版商: American Vacuum Society
关键词: GOLD;ENERGY BEAM DEPOSITION;ELECTRON BEAMS;ORGANOMETALLIC COMPOUNDS;CHEMICAL REACTIONS;CONTAMINATION;ELECTRON MICROSCOPES;Au
数据来源: AIP
摘要:
Electron beam deposition (EBD) provides an inexpensive way to fabricate nanostructures of various materials in a scanning electron microscope (SEM). However, the purity of metals deposited from an organometallic precursor gas is impaired by simultaneously deposited carbon coming both from the organometallic molecule and the residual contamination gas in the SEM chamber. We discuss carbon‐contamination EBD in a standard high‐vacuum SEM and compare it to EBD of Au in an environmental SEM (ESEM). The ESEM allowed us to perform ‘‘environmental’’ EBD (E‐EBD), i.e., EBD in the presence of an environmental gas (1–10 Torr) in addition to the organometallic precursor gas. We built a simple device that contains a reservoir for the organometallic precursor and goes on the sample stage of the ESEM. With this device we were able to highlight the advantages of E‐EBD over conventional, high‐vacuum EBD. We discuss the basic chemical reactions underlying the E‐EBD process.
点击下载:
PDF
(361KB)
返 回