首页   按字顺浏览 期刊浏览 卷期浏览 High‐vacuum versus ‘‘environmental’’ electron beam deposition
High‐vacuum versus ‘‘environmental’’ electron beam deposition

 

作者: Albert Folch,   Jordi Servat,   Joan Esteve,   Javier Tejada,   Miquel Seco,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1996)
卷期: Volume 14, issue 4  

页码: 2609-2614

 

ISSN:1071-1023

 

年代: 1996

 

DOI:10.1116/1.588994

 

出版商: American Vacuum Society

 

关键词: GOLD;ENERGY BEAM DEPOSITION;ELECTRON BEAMS;ORGANOMETALLIC COMPOUNDS;CHEMICAL REACTIONS;CONTAMINATION;ELECTRON MICROSCOPES;Au

 

数据来源: AIP

 

摘要:

Electron beam deposition (EBD) provides an inexpensive way to fabricate nanostructures of various materials in a scanning electron microscope (SEM). However, the purity of metals deposited from an organometallic precursor gas is impaired by simultaneously deposited carbon coming both from the organometallic molecule and the residual contamination gas in the SEM chamber. We discuss carbon‐contamination EBD in a standard high‐vacuum SEM and compare it to EBD of Au in an environmental SEM (ESEM). The ESEM allowed us to perform ‘‘environmental’’ EBD (E‐EBD), i.e., EBD in the presence of an environmental gas (1–10 Torr) in addition to the organometallic precursor gas. We built a simple device that contains a reservoir for the organometallic precursor and goes on the sample stage of the ESEM. With this device we were able to highlight the advantages of E‐EBD over conventional, high‐vacuum EBD. We discuss the basic chemical reactions underlying the E‐EBD process.

 

点击下载:  PDF (361KB)



返 回