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The ADEQUAT project for development and transfer of 0.25 μm logic complementary metal–oxide–semiconductor modules

 

作者: R. DeKeersmaecker,   G. Declerck,   P. Félix,   M. Haond,   C. Hill,   G. Janssen,   J. Lorenz,   H. Maes,   A. Montree,   F. Neppl,   P. Patruno,   M. Rudan,   H. Ryssel,   L. Van den hove,   W. Vandervorst,   A. van Ommen,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  （AIP Available online 1994）
卷期: Volume 12, issue 4  

页码: 2852-2859

 

ISSN:1071-1023

 

年代: 1994

 

DOI:10.1116/1.587204

 

出版商: American Vacuum Society

 

关键词: LOGIC CIRCUITS;MOS JUNCTIONS;RESEARCH PROGRAMS;TECHNOLOGY TRANSFER;OPTIMIZATION;SIMULATION;MATERIALS TESTING;PROCESSING

 

数据来源: AIP

 

摘要:

The ADEQUAT project [Advanced Developments for Quarter Micron complementary metal–oxide–semiconductor (CMOS) Technologies] is executed by a European consortium under the JESSI/ESPRIT programs. It aims at developing new device structures and process modules for the 0.35 and 0.25 μm CMOS logic technology generations, offering improved performance while meeting the reliability and manufacturability constraints. Several examples of choices illustrating this optimization process are presented together with the overall project organization and roadmap.

 

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