Hardness measurement of thin films: Separation from composite hardness
作者:
J. L. He,
W. Z. Li,
H. D. Li,
期刊:
Applied Physics Letters
(AIP Available online 1996)
卷期:
Volume 69,
issue 10
页码: 1402-1404
ISSN:0003-6951
年代: 1996
DOI:10.1063/1.117595
出版商: AIP
数据来源: AIP
摘要:
A composite hardness model based on the function of depth weight factor is presented. The model can be applied to determine the characteristic hardness of surface coatings which are too thin for the hardness to be directly measured. Its application requires only composite hardness data obtained from coated specimens by conventional microhardness measurement. DLC, TiN, and Cu films on substrates of glass, silicon, and AISI 52100 steel were used to verify this composite hardness model. It proved valid for a variety of cases. ©1996 American Institute of Physics.
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