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A simple lateral force sensing technique for near‐field micropattern generation

 

作者: Anatoly Shchemelinin,   Michael Rudman,   Klony Lieberman,   Aaron Lewis,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1993)
卷期: Volume 64, issue 12  

页码: 3538-3541

 

ISSN:0034-6748

 

年代: 1993

 

DOI:10.1063/1.1144280

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We present a simple and general purpose implementation for monitoring the lateral forces between a near‐field optical probe and a surface. A feedback system based on this technique has been incorporated into a near‐field optical fabrication system based on heatless material removal with an argon fluoride excimer laser. This has allowed the construction of an instrument that is capable of directly patterning a wide variety of materials with a resolution of less than 50 nm.

 

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