A simple lateral force sensing technique for near‐field micropattern generation
作者:
Anatoly Shchemelinin,
Michael Rudman,
Klony Lieberman,
Aaron Lewis,
期刊:
Review of Scientific Instruments
(AIP Available online 1993)
卷期:
Volume 64,
issue 12
页码: 3538-3541
ISSN:0034-6748
年代: 1993
DOI:10.1063/1.1144280
出版商: AIP
数据来源: AIP
摘要:
We present a simple and general purpose implementation for monitoring the lateral forces between a near‐field optical probe and a surface. A feedback system based on this technique has been incorporated into a near‐field optical fabrication system based on heatless material removal with an argon fluoride excimer laser. This has allowed the construction of an instrument that is capable of directly patterning a wide variety of materials with a resolution of less than 50 nm.
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