Pyroelectric properties of lead titanate thin films deposited on pt-coated si wafers by multi-target sputtering
作者:
B. Pachaly,
R. Bruchhaus,
D. Pitzer,
H. Huber,
W. Wersing,
F. Koch,
期刊:
Integrated Ferroelectrics
(Taylor Available online 1994)
卷期:
Volume 5,
issue 4
页码: 333-338
ISSN:1058-4587
年代: 1994
DOI:10.1080/10584589408223890
出版商: Taylor & Francis Group
关键词: Multi-target sputtering;PbTiO3thin films;pyroelectric properties.
数据来源: Taylor
摘要:
The deposition of single phase perovskite lead titanate thin films by planar multi-target sputtering on silicon substrates covered with a thin Pt bottom electrode has been investigated. The films exhibited nearly random crystallographic orientation. The films are self polarized, that means they exhibited pyroelectric currents without poling treatment. After additional furnace annealing and poling the pyroelectric coefficient was 1.7.10−4C/m2K. The annealing also reduced the dielectric loss tan δ from 0.05 to 0.01. The temperature measurement for calculation of the pyroelectric coefficient was performed by measuring the resistance of the bottom and top electrode via the van der Pauw method and calibration with a thermo chuck.
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