Doping of Si thin films by low‐temperature molecular beam epitaxy
作者:
H.‐J. Gossmann,
F. C. Unterwald,
H. S. Luftman,
期刊:
Journal of Applied Physics
(AIP Available online 1993)
卷期:
Volume 73,
issue 12
页码: 8237-8241
ISSN:0021-8979
年代: 1993
DOI:10.1063/1.353441
出版商: AIP
数据来源: AIP
摘要:
Two‐dimensional doping sheets (‘‘&dgr; doping’’) are integral parts of many novel semiconductor device concepts. Deep submicron design rules require junction depths significantly below 100 nm. This level of control is difficult to achieve with ion implantation. We discuss the application of thermal, coevaporative doping with Sb and elemental B during Si molecular beam epitaxy at growth temperatures below ≊300 °C to this problem. We show that it is possible to create structures with very high doping levels, yet with very sharp doping transitions. Delta‐doping spikes with a full width at half maximum of <2.7 nm and <4.0 nm have been obtained by secondary‐ion mass spectrometry for Sb and B, respectively, with corresponding up‐slopes of 2.5 and 0.94 nm/decade. Homogeneously doped films show full activation up toNSb≊6×1020cm−3andNB≳1×1021cm−3. Mobilities agree with bulk values at corresponding concentrations. Mesa‐isolatedpnjunctions exhibit ideality factors of 1.05.
点击下载:
PDF
(658KB)
返 回