Insituscanning electron microscope observation of hillock and whisker growth on Al–Ta alloy films for interconnections of thin film transistor–liquid crystal displays

 

作者: E. Iwamura,   T. Ohnishi,   K. Yoshikawa,   K. Itayama,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  （AIP Available online 1994）
卷期: Volume 12, issue 5  

页码: 2922-2924

 

ISSN:0734-2101

 

年代: 1994

 

DOI:10.1116/1.578966

 

出版商: American Vacuum Society

 

关键词: LIQUID CRYSTAL DEVICES;SPUTTERED MATERIALS;ALUMINIUM;ALUMINIUM BASE ALLOYS;TANTALUM ALLOYS;FILM GROWTH;WHISKERS;SURFACE STRUCTURE;SEM;CHEMICAL COMPOSITION;TEMPERATURE EFFECTS;(Al,Ti);Al

 

数据来源: AIP

 

 

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