BaTiO3/SrTiO3multilayered thin films were deposited on Si and Pt/Si substrates. X-ray diffraction clearly shows the formation of the superstructures. Phase transition properties were studied via dielectric measurements. Glassy behavior, characterized by a strong frequency dispersion of dielectric properties, was found in samples with a total thickness of 400 nm, while in samples with a total thickness of 800 nm, normal ferroelectric phase transitions with two dielectric peaks were observed. A preliminary interpretation assumes that size effects which frustrate long range ferroelectric ordering may lead to the relaxational behavior inBaTiO3/SrTiO3superstructures. ©1998 American Institute of Physics.