We have fabricated thin films of YBa2Cu3Oxby dc triode sputtering from two metallic targets. Post‐annealing in pure O2after sputtering resulted in superconducting films with aTconset as high as 89 K and a midpointTcof 75 K. We report preliminary results of films deposited on sapphire, MgO and sol‐gel coatings of ZrO2on sapphire, with and without buffer layers of Ag. The chemical and physical structures of these films were analyzed by using several x‐ray diffraction techniques and Rutherford backscattering spectroscopy.