Monitoring of intermixing and interdiffusion by x‐ray diffraction of ion‐implanted quantum‐well structures
作者:
I. Karla,
J. H. C. Hogg,
W. E. Hagston,
J. Fatah,
D. Shaw,
期刊:
Journal of Applied Physics
(AIP Available online 1996)
卷期:
Volume 79,
issue 4
页码: 1898-1902
ISSN:0021-8979
年代: 1996
DOI:10.1063/1.361093
出版商: AIP
数据来源: AIP
摘要:
The intermixing (and associated interdiffusion) resulting from ion implantation of argon ions into Cd1−xMnxTe quantum‐well structures has been investigated. The experimental value of the mixing parameter of 1.5×103A˚/eV is large compared with the values reported for this parameter in metallic superlattices, and is consistent with an appreciable degree of inter diffusion accompanying the implantation process. ©1996 American Institute of Physics.
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