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Monitoring of intermixing and interdiffusion by x‐ray diffraction of ion‐implanted quantum‐well structures

 

作者: I. Karla,   J. H. C. Hogg,   W. E. Hagston,   J. Fatah,   D. Shaw,  

 

期刊: Journal of Applied Physics  (AIP Available online 1996)
卷期: Volume 79, issue 4  

页码: 1898-1902

 

ISSN:0021-8979

 

年代: 1996

 

DOI:10.1063/1.361093

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The intermixing (and associated interdiffusion) resulting from ion implantation of argon ions into Cd1−xMnxTe quantum‐well structures has been investigated. The experimental value of the mixing parameter of 1.5×103A˚/eV is large compared with the values reported for this parameter in metallic superlattices, and is consistent with an appreciable degree of inter diffusion accompanying the implantation process. ©1996 American Institute of Physics.

 

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