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A dual‐scan piezo element for scanning probe microscopes

 

作者: T. L. Porter,  

 

期刊: Review of Scientific Instruments  （AIP Available online 1994）
卷期: Volume 65, issue 7  

页码: 2416-2416

 

ISSN:0034-6748

 

年代: 1994

 

DOI:10.1063/1.1144700

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A simple method of achieving dual scan ranges with a single piezo element in scanning probe microscope instruments is described. Both high‐resolution small‐scan ranges and low‐resolution large‐scan areas are obtainable.

 

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